sulfur hexafluoride SF6
Specialty Gases 2021-12-14 591
Specification :
| Grade Classification | GB/T12022-2006 | IEC376-71 | High Purity | |
| 3.5N | 4N | |||
| (SF6) % | ≥99.9 | ≥99.8 | ≥99.95 | ≥99.99 |
| Air % | ≤0.04 | ≤0.05 | ≤0.03 | ≤0.003 |
| (CF4) % | ≤0.04 | ≤0.05 | ≤0.03 | ≤0.003 |
| Water ppm | ≤5 | ≤8 | ≤3 | ≤1 |
| Acidity ppm | ≤0.2 | ≤0.3 | ≤0.15 | ≤0.1 |
| Hydrolyze fluoride(As HF) ppm | ≤1 | ≤1 | ≤0.8 | ≤0.2 |
| Mineral oil ppm | ≤4 | ≤10 | ≤3 | ≤1 |
| Toxicity | Non-tox. | Non-ox. | Non | Non |
