colorless odorless CF4
Specialty Gases 2021-12-14 537
Refrigerant:
Tetrafluoromethane is sometimes used as a low temperature refrigerant. Etching:
It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride.
Carbon Tetrafluoride CF4
CAS No.: 75-73-0
EINECS No.: 200-896-5
UN No.: UN1982
Purity: 99.999%
Dot Class: 2.2
Appearance: Colorless
Grade Standard: Industrial Grade, Refrigerant Grade
| Specification | 99.999% |
| Oxygen+Argon | ≤1ppm |
| Nitrogen | ≤4 ppm |
| Moisture(H2O) | ≤3 ppm |
| HF | ≤0.1 ppm |
| CO | ≤0.1 ppm |
| CO2 | ≤1 ppm |
| SF6 | ≤1 ppm |
| Halocarbynes | ≤1 ppm |
| Total Impurities | ≤10 ppm |
